Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-112 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0008 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
filingDate |
2002-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ca65312286475143aa4269f0493bc9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eacb92e522463a3b675ddef320782dea |
publicationDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2002155711-A1 |
titleOfInvention |
Micromechanical part and method for its manufacture |
abstract |
A method for manufacturing a micromechanical part, having a plurality of components that move with respect to one another, from a substrate, with a conductive coating being applied to at least one facing surface of the plurality of components that move with respect to one another. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1435336-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1435336-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005014374-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7507669-B2 |
priorityDate |
2001-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |