| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
1999-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41675d96a94be21d37ceb306e782aa17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88da1f354f147989274ca1c6ecb30bdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109f04e2e4433f04a4fb7be21197cd2b |
| publicationDate |
2002-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002142600-A1 |
| titleOfInvention |
Abrasive composition for the integrated circuits electronics industry |
| abstract |
Abrasive composition for the integrated circuits electronics industry comprising an aqueous acid suspension of individualized colloidal silica particles not linked to each other by siloxane bonds and an abrasive surfactant, this abrasive being for mechanical chemical polishing in the integrated circuits industry, comprising a fabric impregnated by such a composition, and a process for mechanical chemical polishing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003157804-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6964600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008182485-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005026205-A1 |
| priorityDate |
1998-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |