http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002084779-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2001-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_640ab866fe369833e4f40d9444261ff7 |
| publicationDate | 2002-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2002084779-A1 |
| titleOfInvention | Mark forming method, mark forming apparatus and analyzing apparatus |
| abstract | A mark forming apparatus including a guide needle for forming a mark, a positioning mechanism, a solution supply device, and a heating unit is disclosed. The positioning mechanism is used for positioning the guide needle above a fault location of a semiconductor device. The solution supply device supplies a solution containing a coloring agent and a volatile solvent to the fault location until it touches a tip of the guide needle. The heating unit evaporates the volatile solvent to form a mark consisting of the coloring agent surrounding the fault location. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013070475-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8185780-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8826076-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9500719-B2 |
| priorityDate | 2000-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.