patent/US-2002081794-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002081794-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
filingDate	2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e3f816188d6a503518ab2da629086b
publicationDate	2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2002081794-A1
titleOfInvention	Enhanced deposition control in fabricating devices in a semiconductor wafer
abstract	A method for an enhanced deposition control, comprises forming at least one device within a substrate of a semiconductor wafer, and depositing a silicon nitride layer over the wafer in a reactor at a pressure of at least approximately 10 4 Pa.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8405164-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326656-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326634-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005218438-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7470973-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617945-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1411546-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011020987-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-155041-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7329913-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8581258-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8362566-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005156171-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8329596-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102446838-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005158970-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006071275-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9048314-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8368135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7714397-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007096170-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005253204-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286755-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121897-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422946-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006001109-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007001219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7902014-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004094807-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7898041-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007034972-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531437-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531393-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004036127-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7859053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9577095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7388259-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007215919-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8569186-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858481-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748391-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7396767-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560756-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8294180-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006068550-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006172497-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007222000-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004036126-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7268058-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879675-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8749026-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006186484-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7279375-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008121950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368583-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7504678-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005224800-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8022445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268709-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8816394-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7514346-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006118789-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084818-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7105394-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309627-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006214231-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9337307-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8273626-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006099763-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138553-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7241653-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138552-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228840-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9806195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006094195-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006157687-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007040223-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005148137-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8067818-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326622-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1815506-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006157794-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8138103-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1815506-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741733-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8071983-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7015126-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005106940-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100429783-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563701-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009197376-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006057787-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005106940-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006086977-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7820513-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010072580-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670928-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10236356-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937907-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006118789-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006128131-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03050853-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7449373-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03050853-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9450092-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11257718-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005158986-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007281409-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009280614-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9806193-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9614083-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8502351-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005010997-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005010997-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7005366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006063332-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199949-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402875-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006197161-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-129260-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7276755-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8183646-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7193279-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7037790-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7427794-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004067635-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7042009-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006223302-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7256137-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6914295-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8933458-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003181005-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007238273-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7479509-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8193567-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6909151-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006033095-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010200917-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7154118-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006102955-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009149531-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004262692-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6974738-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006014845-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006014341-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8664694-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006172556-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007152266-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008099839-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858478-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224754-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005242406-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7105390-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005064680-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7348284-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7989280-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7241674-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358121-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9190518-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007090416-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7368791-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593599-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2439883-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2472587-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2439883-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7960794-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019279910-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148837-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078729-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9385180-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8399922-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009291537-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7736956-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006011996-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9786565-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004241916-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10367093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7265425-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8283707-B2
priorityDate	2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

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Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129960545 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67745

Total number of triples: 215.