| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-948 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2001-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_357569b7097e43f1aa598e4a374b8b1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47575b318881fbe64430385748a02011 |
| publicationDate |
2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002081499-A1 |
| titleOfInvention |
Novel polymers and photoresist compositions for short wavelength imaging |
| abstract |
The present invention includes polyacetal polymers and photoresist compositions that comprise the polymers as a resin binder component. Photoresists of the invention include chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-300 nm, particularly 157 nm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019109010-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103717561-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009149349-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102468232-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8981163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190040870-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7220486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109659228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016112274-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103717561-B |
| priorityDate |
2000-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |