| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2893 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-21 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-20 |
| filingDate |
2001-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eac5cac4fe700c78df6650f82629c383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f0d1e9f8b2ddef9c0151d4c11f3f025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53e560c707ddcb76b300d02a252f8f82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36d486fade55ac9c1caa66998af877c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d4fd96060dd61f2e93fbd1ea78c1126 |
| publicationDate |
2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002053643-A1 |
| titleOfInvention |
Convergent charged particle beam apparatus and inspection method using same |
| abstract |
A convergent charged particle beam apparatus and method includes an electron beam image observation arrangement which observes an electron beam image of a surface of a specimen mounted on a movable stage inside of a vacuum chamber when an electron beam converged by an electron optical system is irradiated and scanned over the surface of the specimen and detecting secondary charged particles produced from the specimen so as to provide electron image data of the surface. A height detector optically detects a surface height of the specimen by irradiating light from outside of the vacuum chamber onto the specimen and detecting reflected light from the specimen with a detector disposed outside of the vacuum chamber. A controller controls a focal point of the converged and focused electron beam in accordance with the output from the height detector, and a display displays the electron image of the surface of the specimen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I723289-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183360-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111164726-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8310195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7267731-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8120304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9217633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010148715-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004129351-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019063529-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111149186-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012103428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022084780-A1 |
| priorityDate |
1998-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |