abstract |
The present invention provides a ceramic heater having better anti thermal shock property. A ceramic substrate 12 is formed by providing heat generation bodies 14 a and 14 b on the surface of a green sheet made from a slurry containing powdered ceramics, sandwiching the green sheet with other green sheets from both upper and lower sides and then laminating and pressing the compiled green sheets. At least some of the heat generation bodies 14 a and 14 b are disposed on a level P 1 b offset from a level P 1 a of other heat generation bodies in the direction of thickness of the ceramic substrate 12. |