| abstract |
A polymer used in a chemically amplified resist is represented by the following formula: n n n wherein R 1 , R 3 and R 5 are each independently selected from the group consisting of —H, and —CH 3 ; R 2 is selected from the group consisting of t-butyl, tetrahydropyranyl, and 1-alkoxyethyl; R 4 is selected from the group consisting of —H, —CH 3 , t-butyl, tetrahydropyranyl, and 1-alkoxyethyl; x is an integer ranging from 1 to 4; and wherein l, m, and n are selected such that l/(l+m+n) ranges from 0.1 to 0.5, m/(l+m+n) ranges from 0.01 to 0.5, and (l+m)/(l+m+n) ranges from 0.1 to 0.7. |