| abstract |
When it is determined that a pulse width of high harmonic light Lb to jitter of discharge light Ld is not appropriate as a result of comparison between a waveform of the discharge light Ld and that of the high harmonic light Lb, a main controller judges that the jitter of the discharge light Ld in a gas laser device is large, and controls to move a translating stage to extend a cavity length so to increase a pulse width of fundamental harmonic light La which is laser-oscillated by an oscillator. When the main controller determines that a light intensity of the high harmonic light Lb has a value smaller than a predetermined value and is not normal, it controls to move the translating stage to shorten the cavity length so to enhance the light intensity of seed light La to be laser-oscillated by the oscillator. Thus, the light intensity and pulse width of the seed light at injection locking are optimized. |