Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-066 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 |
filingDate |
2001-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b106bab26259be9d861e7313ecc159 |
publicationDate |
2002-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2002009864-A1 |
titleOfInvention |
Methods, complexes, and system for forming metal-containing films |
abstract |
A method of forming a film on a substrate using Group III metal complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119312-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6979370-B2 |
priorityDate |
1996-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |