| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
1998-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2f6b0733b9cccb347b7829d6b36be1f |
| publicationDate |
2002-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002003208-A1 |
| titleOfInvention |
Space charge neutralization of an ion beam |
| abstract |
A device is provided for treating a workpiece with positively charged ions. The device includes an apparatus including an ion source for producing a positive ion beam and directing the positive ion beam toward a surface of a work piece. The device further includes a source for introducing negative ions into the beam path in at least one selected region downstream of the ion source. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004084635-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011089321-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009261248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007018114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007146394-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6762423-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828269-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7851773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009250603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8436326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006127327-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006127327-A2 |
| priorityDate |
1997-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |