http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001054558-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2001-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1319f95cdc56e7278055674377b47e39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf254747c4c40149ffdfb3c40da43791 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b778b7dcad93f0de238093e40c37114 |
| publicationDate | 2001-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2001054558-A1 |
| titleOfInvention | Method for producing a semiconductor device |
| abstract | A producing method of the present invention includes (i) forming a wiring line above a semiconductor substrate, (ii) forming an insulating layer above the semiconductor substrate and the wiring line, (iii) forming an opening penetrating the insulating layer in the insulating layer with respect to a portion above the wiring line, (iv) forming a barrier layer whose surface is formed of a material A, so as to cover a surface of the insulating layer and an inner surface of the opening, (v) forming a metal layer made of a first metal on the barrier layer, and (vi) depositing a second metal inside the opening by a plating, thus forming a via plug containing the second metal. A rest potential P A of the material A with respect to the second metal is larger than a rest potential P M of the first metal with respect to the second metal. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009220683-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7883614-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905459-B1 |
| priorityDate | 2000-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.