| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2001-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_887e267a7a76104aa59593cda7bd4c5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d91bc4b8d5464784f3dd7b0991bfcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80dfacac31166f238b435074ea0dae9d |
| publicationDate |
2001-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2001042845-A1 |
| titleOfInvention |
Wafer orientation sensor for GaAs wafers |
| abstract |
A wafer orienter includes a mechanism for rotating a wafer and a wafer orientation sensor. The wafer orientation sensor includes a light source for emitting light, a light sensor for sensing the light emitted by the light source as an edge of the wafer is rotated between the light source and the sensor and for producing a sensor signal representative of the sensed light, and an optical filter positioned between the light source and the light sensor. The optical filter has a light-transmission characteristic wherein light in the pass band of the wafer is blocked. When the wafer orientation sensor is used for sensing gallium arsenide wafers, the optical filter is selected to block light at wavelengths greater than about 860 nanometers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012327428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007097383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11748871-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016095282-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8614797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008218772-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7601272-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014111797-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7675048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007012660-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022101506-A1 |
| priorityDate |
2000-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |