| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f481982f9992cbb527a6d31589832958 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2001-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e55027c14fededdd523c751ca51833d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a36e95771883b5ab2c4af141c2f61628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cae960e65d9b396c9e07237e07b86e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_084b49814ee8f694f9e5c443fe3b8245 |
| publicationDate |
2001-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2001036796-A1 |
| titleOfInvention |
Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method |
| abstract |
A polishing fluid comprising a distributed organic phase and a continuous aqueous phase, each phase comprising at least one complexing agent. The aqueous phase also having abrasive particles dispersed therein. Reaction products generated during polishing interact with the aqueous phase complexing agent to form water soluble metallic complexes, the water soluble metallic complexes diffuse to an organic/water interface where they release complexing agent molecules in the aqueous phase and generate metal ions which interact with the organic phase complexing agent to form organometallic complexes. Further disclosed is a polishing method, a semiconductor device and semiconductor device fabrication method utilizing the polishing fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7425172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012055865-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8956430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022164837-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105754490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005009448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2429713-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009042485-A1 |
| priorityDate |
2000-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |