| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-326 |
| filingDate |
2001-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bb0e21b400fcb708abaeb6b099222a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eaf5c1bfc08806e252c938ac902193d |
| publicationDate |
2001-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2001032980-A1 |
| titleOfInvention |
Semiconductor device having a thin film field-effect transistor, liquid crystal display device, and production method thereof |
| abstract |
A highly reliable semiconductor device is provided. The semiconductor device is provided with a thin film field-effect transistor having a channel region and includes a substrate and a semiconductor film. The semiconductor film is formed on the substrate and includes the channel region of the thin film field-effect transistor. An upper surface of the semiconductor film is planarized by removing a surface layer of the semiconductor film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008237593-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002179908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009001353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008073793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9362273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7132317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007065995-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7755198-B2 |
| priorityDate |
2000-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |