| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate |
2001-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a087c1f4bc238db4384e40c00a47a0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36317db9d02f6048dbb391660a5ef6c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab38e953f2bffc735a3a15df7511cac5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e719f2ec3cb2ff62210b949a084eb887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df8e8f4a3d2eff417acfedfc0033010
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbbf9cee42df1626cf1d7ba67a2715e7 |
| publicationDate |
2001-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2001009178-A1 |
| titleOfInvention |
Method of holding substrate and substrate holding system |
| abstract |
Present invention provides a method of holding substrate and a substrate holding system where the amount of foreign substances on the back surface can be decreased, and a little amount of foreign substances may be transferred from a mounting table to a substrate. The substrate holding system comprises a ring-shaped leakage-proof surface having smooth surface on the specimen table corresponding to the periphery of the substrate, a plurality of contact holding portions against the substrate on the specimen table between the corresponding position to the periphery of the substrate and the corresponding position to the center of the substrate, and electrostatic ttraction means for fixing the substrate by contacting the back surface of the substrate to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts to the cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact to each other in the large portion of the remaining area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6676805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6524428-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9394128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7993460-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018019169-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015225952-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004261721-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6645871-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014345523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6336991-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015197405-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001039161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9153472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6846213-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I557828-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7615133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011262315-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008138535-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8747559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100440422-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8845810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112530851-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11219096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022026939-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6610171-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6610170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005127619-A1 |
| priorityDate |
1993-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |