http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11548829-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9607
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B21D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-5615
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-56
filingDate 2021-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2023-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d3d8980eb7d5f14f862d149f3e54299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c353628f7760eb0450131495e3891cab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff1d40f9c89397a0742d354d08d7c98e
publicationDate 2023-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11548829-B2
titleOfInvention Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device
abstract According to the present invention, a dense composite material includes titanium silicide in an amount of 43 to 63 mass %; silicon carbide in an amount less than the mass percentage of the titanium silicide; and titanium carbide in an amount less than the mass percentage of the titanium silicide. In the dense composite material, a maximum value of interparticle distances of the silicon carbide is 40 μm or less, a standard deviation of the interparticle distances is 10 or less, and an open porosity of the dense composite material is 1% or less.
priorityDate 2020-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6182082-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018108556-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717

Total number of triples: 67.