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publicationDate 2022-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11513411-B2
titleOfInvention Pretreatment of transparent conductive oxide (TCO) thin films for improved electrical contact
abstract Certain embodiments relate to optical devices and methods of fabricating optical devices that pre-treat a sub-layer to enable selective removal of the pre-treated sub-layer and overlying layers. Other embodiments pertain to methods of fabricating an optical device that apply a sacrificial material layer.
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