http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11512409-B2

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filingDate 2017-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547c59287a1e606ad9bdb465a0a5035d
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publicationDate 2022-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11512409-B2
titleOfInvention Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
abstract The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: —providing a single crystalline diamond substrate or layer; —providing a first adhesion layer on the substrate or layer; —providing a second adhesion layer on the first adhesion layer: —providing a mask layer on the second adhesion layer; —forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and—etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.
priorityDate 2017-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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