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filingDate 2021-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b27a41f4c02f7ab27b9b2e255377e9c9
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publicationDate 2022-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11437369-B2
titleOfInvention Array of multi-stack nanosheet structures
abstract An array of multi-stack transistor structures is provided, wherein the multi-stack transistor structures are arranged in a plurality of rows and a plurality of columns in the array, wherein each of the multi-stack transistor structures includes two or more vertically arranged transistor stacks, and wherein a dam structure is formed between adjacent two rows in a same column so that a multi-stack transistor structure in one of the adjacent two rows is electrically isolated from a multi-stack transistor structure in the other of the adjacent two rows in the same column.
priorityDate 2020-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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