| abstract |
The present invention provides an array substrate, a manufacturing method thereof, and a display panel. The array substrate includes a substrate, a buffer layer, an active layer, a gate insulating layer, a gate layer, an interlayer dielectric layer, a source drain layer, and a planarization layer. The gate insulating layer is formed on the active layer and the buffer layer. The interlayer dielectric layer is formed on the gate layer and the gate insulating layer. The source drain layer is patterned to form a source and a drain, and is connected to the active layer through via holes. The planarization layer in the present invention is easier to fill in. |