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filingDate 2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11417514-B2
titleOfInvention Film forming method and film forming apparatus
abstract There is provided a film forming method, including: forming a film containing silicon, carbon and nitrogen on a substrate in a first process; and oxidizing the film with an oxidizing agent containing a hydroxy group and subsequently supplying a nitriding gas to the substrate in a second process.
priorityDate 2019-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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