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filingDate 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35b3ef20200211914ec71324dd9065e5
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publicationDate 2022-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11404844-B2
titleOfInvention Semiconductor structure and method of manufacturing the same
abstract A semiconductor structure is provided. The semiconductor structure includes: a substrate having a cavity recessed from a top surface of the substrate toward a bottom surface of the substrate opposite to the top surface, wherein the cavity has a sidewall and a bottom surface, and the bottom surface of the cavity is substantially parallel to the top surface of the substrate; a light source structure in the cavity, and the light source structure emitting a light from a sidewall of the light source structure; and a diffractive optical element (DOE) over the top surface of the substrate; wherein the sidewall of the cavity is a sloped surface, so that when the light is incident on the sidewall, the sloped surface reflects the incident light to generate a reflected light toward the DOE. Associated semiconductor structure and manufacturing method are also disclosed.
priorityDate 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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