| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8ce47e29284ea3b1366eccc44f6e1c03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bba710e7aaa56d8ab15a910fcd3dc5f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B3-0025 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-00 |
| filingDate |
2019-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c318c0fca0396b9373b2d2784d8b1f6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b19fe2099191256e65a926cb6087f2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4030aa9e8cd7abf5d1a433b8f9374cf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_297f33c265735770956787f901e2158e |
| publicationDate |
2022-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11399713-B2 |
| titleOfInvention |
Measurement of multi-layer structures |
| abstract |
Systems and methods for assessing multi-layer structures in which a spectrum array is generated from low coherence interferometry and input into a statistical estimator, which determines the thickness and layer number based on the inputted spectrum and other information, including information about a source intensity noise, Poisson noise, and dark noise associated with the low coherence interferometry. |
| priorityDate |
2014-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |