http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11385545-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-06
filingDate 2019-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f58194a3cc6653708f3ff7bf701ce2ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_293a1b6331b4a09b3fadd9ff09b58464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9a2d19daef3945566a46b2c15641d39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2d9abd948adc1433068f6da615abdd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cf7100c1160799114a05de6913b9913
publicationDate 2022-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11385545-B2
titleOfInvention Resist underlayer composition, and method of forming patterns using the composition
abstract A resist underlayer composition and a method of forming patterns, the composition including a polymer including at least one of a first moiety represented by Chemical Formula 1-1 and a second moiety represented by Chemical Formula 1-2; a thermal acid generator including a salt composed of an anion of an acid and a cation of a base, the base having pKa of greater than or equal to about 7; and a solvent,
priorityDate 2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017199459-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013122570-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101566532-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017107185-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140085123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100934436-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201239047-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180090640-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006341590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002012761-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007017970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201500858-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019008281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101236560-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101532103-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009297-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017038687-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013073061-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101536798-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180121205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3676440-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101652148-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170132082-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140056089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011527461-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280508
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456143606
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419551514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419505727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458396233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409010033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123047
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455502157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974

Total number of triples: 80.