| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3d8a3f25b402c2c902582d6c1dfd9ce |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02818 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-56 |
| filingDate |
2021-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4092d4e71ad7d2f7edbc85ed923fe8d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24c311849219e675c5d7ffab56a03917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6529b72f3ea21ab61372e66e6c6609a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5908552a21794beeae1ebbc9b5afcd44 |
| publicationDate |
2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11329625-B2 |
| titleOfInvention |
Film bulk acoustic sensors using thin LN-LT layer |
| abstract |
Acoustic sensor devices and sensor systems are disclosed. An acoustic sensor device includes a piezoelectric plate having a front surface and a back surface. A floating back-side conductor pattern is formed on the back surface. A first and second front-side conductor patterns are formed on a portion of the front surface opposite the back-side conductor pattern. A sensing layer is formed over all or a portion of the floating back-side conductor pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11716070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022239279-A1 |
| priorityDate |
2019-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |