http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11326076-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2020-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64088cc30f69dd9a1036a9b9a31ee853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbc4e85e963216bd77e51338e2842080
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5355b61940d8d3d8c1adf36b1bb7af62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6d53f6a0cae9f6c4043bf21817ae8b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a15575a891911fd190c804d027c305cc
publicationDate 2022-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11326076-B2
titleOfInvention Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with low abrasive concentration and a combination of chemical additives
abstract Shallow Trench Isolation (STI) chemical mechanical planarization (CMP) polishing compositions, methods and systems of use therefore are provided. The CMP polishing composition comprises abrasives of ceria coated inorganic metal oxide particles, such as ceria-coated silica; and dual chemical additives for providing high oxide film removal rate. The dual chemical additives comprise gelatin compounds possessing negative and positive charges on the same molecule, and non-ionic organic molecules having multi hydroxyl functional groups in the same molecule.
priorityDate 2019-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012021675-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006001558-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008244316-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7247082-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6914001-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5876490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201043686-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6616514-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012077419-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002039875-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019080927-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009261291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006215077-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6964923-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016160083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012032461-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015102012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544892-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6984588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006119249-A2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419585166
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID493591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458341139
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419581501
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530007
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11850
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID151263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5565
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23618252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557668
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091914
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415853316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405573
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406719
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394593
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11008084
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523898
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID892
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419482110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410697574
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412563222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431778542
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413534775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407699550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419534805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458206601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412701818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405826
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6567
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID169019
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5311110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID439163
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448056355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID39800
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862862
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393712
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393714
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405790
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCO01945
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90540
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6134
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226507396
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557669
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458129977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490943
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID155017619
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID438985547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458129978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID155017620
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410485865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410932322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526590
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6251
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID438985546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2450
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID149063468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID438885695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458082930
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID103023
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458088814
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458088484
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6321330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527069
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1100
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413835
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5780
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422011
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456942846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227244627
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161658
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433323524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395951
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222285
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513606
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407914710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10975657
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154963944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10953859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413306
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042

Total number of triples: 203.