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filingDate 2019-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b3b4f3a959e5c8ecda4bdd0f7452d1a
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publicationDate 2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11320394-B2
titleOfInvention Biosensor electrode having three-dimensional structured sensing surfaces
abstract Embodiments of the invention include a method of using a sensor. The method includes accessing a sample and exposing the sample to the sensor. The sensor includes a sensing circuit having with a field effect transistor (FET) having a gate structure. A cavity is formed in a fill material that is over the gate structure. A probe of the sensor is within a portion of the cavity. An upper region of the probe is above a top surface of the fill material, and a lower region of the probe is below the top surface of the fill material. The probe structure includes a 3D sensing surface structure, and a liner is formed on the 3D sensing surface and configured to function as a recognition element. A portion of the liner is on the lower region of the probe and positioned between sidewalls of the cavity and the 3D sensing surface.
priorityDate 2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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