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filingDate 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11267698-B2
titleOfInvention Low profile transducer module
abstract A transducer structure is disclosed. The transducer structure may include a substrate with a MEMS structure located on a first side of the substrate and a lid coupled to the first side of the substrate and covering the MEMS structure. The substrate may include an electric contact which is laterally displaced from the lid on the first side of the substrate and electrically coupled to the MEMS structure.
priorityDate 2014-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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