Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2252-103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F23J2219-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2279-51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2247-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2247-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-302 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D50-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-10 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-78 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-10 |
filingDate |
2019-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40c1d695bbbcbd50e5a9287c9bf981d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d1c703af6c2572edc71a190d0d3f94d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b92939f58663391b902540bc387548ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0027b8cb4ac193780b060e2aa87eb54 |
publicationDate |
2022-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-11260336-B2 |
titleOfInvention |
Active wet scrubbing filtration system |
abstract |
An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools. |
priorityDate |
2018-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |