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publicationDate 2022-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11254698-B2
titleOfInvention Cobalt precursor and methods for manufacture using the same
abstract The inventive concept relates to a cobalt precursor, a method for manufacturing a cobalt-containing layer using the same, and a method for manufacturing a semiconductor device using the same. More particularly, the cobalt precursor of the inventive concept includes at least one compound selected from the group consisting of a compound of Formula 1 and a compound of Formula 2.
priorityDate 2019-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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