http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11240904-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2019-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73e2892d9ee38bc9d9cc2ecbf082e2ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b44a1135ec4683042eb9b1caef1b06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de46ed9265566657c68d0acfe3f450bd |
| publicationDate | 2022-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-11240904-B2 |
| titleOfInvention | Apparatus for and method of controlling coalescence of droplets in a droplet stream |
| abstract | Provided is an apparatus for and method of controlling formation of droplets (102a, b) used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source (92) includes a fluid exiting an nozzle (98) and a sub-system having an electro-actuatable element (104) producing a disturbance in the fluid (96). The droplet source produces a stream (100) that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The electro-actuatable element is driven by a hybrid waveform that controls the droplet generation/coalescence process. Also disclosed is a method of determining the transfer function for the nozzle. |
| priorityDate | 2018-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.