Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e41651508566f0385833e1ba14a21ffd |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0636 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
filingDate |
2019-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d07cb40ed82f6fb0567d0df9200c01de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf36a2013e5ca17e589a906b520c993 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbd912273c234e900171816b31dc6c35 |
publicationDate |
2022-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-11231388-B2 |
titleOfInvention |
Chemical sensor with air via |
abstract |
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022196595-A1 |
priorityDate |
2016-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |