http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227874-B2

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filingDate 2019-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f75a11c04669ed5a317f908eb2c838f0
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publicationDate 2022-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11227874-B2
titleOfInvention Photosensitive element having substantially flat interface between electrode and photosensitive layer and manufacturing method thereof
abstract A photosensitive element and a manufacturing method thereof are provided. The manufacturing method of the photosensitive element includes successively depositing a second conductive layer, a photosensitive material layer, and a first top electrode material layer on a substrate; forming a first patterned photoresist layer on the first top electrode material layer; patterning the first top electrode material layer by using the first patterned photoresist layer as a mask to form a first top electrode; removing the first patterned photoresist layer; patterning the photosensitive material layer by using the first top electrode as a mask to form a photosensitive layer; forming an insulation layer having an opening on the first top electrode; and forming a second top electrode on the insulation layer, and the second top electrode is electrically connected to the first top electrode via the opening.
priorityDate 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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