| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9047b16961c0aee78d7de367969339b2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0827 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C37-0053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0888 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C43-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C43-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-42 |
| filingDate |
2018-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43a19319ba4549be6ed53391b3f97424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a3113be4681781da4d0a8e41e964109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94bc5abc3b7576af27b914019b71d0f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39a03d395c1b84781b0a726bbe166b9f |
| publicationDate |
2021-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11192282-B2 |
| titleOfInvention |
Template, template manufacturing method, and semiconductor device manufacturing method |
| abstract |
According to one embodiment, a template for imprint patterning processes comprises a template substrate having a first surface and a pedestal on the first surface of the template substrate, the pedestal having a second surface spaced from the first surface in a first direction perpendicular to the first surface. A pattern is disposed on the second surface. The pedestal has a sidewall between the first surface and the second surface that is at an angle of less than 90° to the second surface. |
| priorityDate |
2018-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |