http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183405-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate | 2019-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c6235d1de8ba84ff1efc51dda0307e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32847445e307e6acea9477da022e3e1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_560fd6d7e086bdf7b944d8004e0ff22f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5638998f4119ec0478bb27d517bd8da4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc016c39e130e7be82e5d8d90249b372 |
| publicationDate | 2021-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-11183405-B2 |
| titleOfInvention | Semiconductor manufacturing apparatus |
| abstract | A semiconductor manufacturing apparatus includes an air distributor inside a chamber. The air distributor includes a first annular plate and a second annular plate disposed in an interior volume of the chamber, and an inner surface of the first annular plate and an inner surface of the second annular plate are connected to each other. A hollow region is defined by the first annular plate and the second annular plate. A gas through hole is extended from an outer surface of the first annular plate to the inner surface of the first annular plate. A plurality of ditches are between the inner surface of the first annular plate and the inner surface of the second annular plate, wherein the ditches are connected with the gas through hole and extended from the gas through hole to the hollow region to blow gas toward the hollow region. |
| priorityDate | 2014-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.