| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-1093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1012 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2251 |
| filingDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef6d1c291964d47c97d3c39d45a4122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6086289a19477c58ddcf8d3e576b39ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcb35f5165fc33c1af1661e069c873cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d774e7a2abd8f707e20bad6817e42bed |
| publicationDate |
2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11143606-B2 |
| titleOfInvention |
Particle measuring device and particle measuring method |
| abstract |
To enable evaluation of a shape of a fine particle and a fine particle type, a substrate is set as a substrate on which an isolated fine particle to be measured and an isolated standard fine particle in the vicinity of the isolated fine particle to be measured are disposed, and a scanning electron microscope body including a detector configured to detect secondary charged particles obtained by scanning a surface of the substrate with an electron beam probe, and a computer that processes a detection signal and generates an image of the isolated fine particle to be measured and the isolated standard fine particle are provided. The computer corrects a shape of the isolated fine particle to be measured by using a measurement result of the isolated standard fine particle disposed in the vicinity of the isolated fine particle to be measured. Further, by attaching a fine particle spreading tank equipped with a fine particle suspension dropping device inside the microscope body, automatic measurement including dropping of fine particle suspension onto a surface of a surface-modified substrate is possible. |
| priorityDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |