| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
2020-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117dddef92e1b987be801324ddd50e22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_029981f6fc46995f8968162daa6ec60e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1adf53bc6c899e18848a85d797d33979
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efd92298ba01e1660d435024768ba784
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8353aaee3cc30d112363c2b80d4e6731 |
| publicationDate |
2021-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11139145-B2 |
| titleOfInvention |
Ion implantation system with mixture of arc chamber materials |
| abstract |
A system and method for ion implantation is described, which includes a gas or gas mixture including at least one ionizable gas used to generate ionic species and an arc chamber that includes two or more different arc chamber materials. Using the system ionic species are generated in the arc chamber with liner combination, and one or more desired ionic species display a higher beam current among the ionic species generated, which is facilitated by use of the different materials. In turn improved implantation of the desired ionic species into a substrate can be achieved. Further, the system can minimize formation of metal deposits during system operation, thereby extending source life and promoting improved system performance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682540-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021398773-A1 |
| priorityDate |
2019-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |