| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-417 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2016-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9474cc20d5698478d74f3cd06dd3acaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1fa1c8944ead4b5c138f4ae88411558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74b86f4ffef9fddea9967d964a3a4813 |
| publicationDate |
2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11107924-B2 |
| titleOfInvention |
Systems and methods to reduce FinFET gate capacitance |
| abstract |
The disclosure illustrates systems and methods for removing at least some excess gate material of a FinFET transistor. A FinFET transistor with the excess gate material removed may include a gate with a T-shaped cross-section. The narrower portion of the cross-section may be processed using backside wafer processing. The width of the narrower portion may be defined by a spacer. |
| priorityDate |
2016-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |