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filingDate 2019-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11107707-B2
titleOfInvention Wet etch apparatus and method of using the same
abstract A method includes dispensing a chemical solution including charged ions onto a semiconductor substrate to chemically etch a target structure on the semiconductor substrate, and applying an electric field on the semiconductor substrate during dispensing the chemical solution on the semiconductor substrate, such that the charged ions in the chemical solution are moved in response to the electric field.
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