| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e455ca1b5fa4b2da3bfaef2acec7ee9f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G11-86 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G11-86 |
| filingDate |
2018-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95032f3d1667ed365a053982046d68d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06b3ce87fda52e8af76e212ba9865bc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b249e7832a2c6631b852d49ea1ebe24d |
| publicationDate |
2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11101082-B2 |
| titleOfInvention |
On-chip supercapacitor with silicon nanostructure |
| abstract |
An on-chip supercapacitor has an electrode that includes one-dimensional silicon nano structures coated with a first layer of titanium nitride. The on-chip supercapacitor also includes a second layer of manganese dioxide deposited on the first layer. An associated method of providing an on-chip supercapacitor electrode on a silicon substrate includes providing a plurality of one-dimensional silicon nanostructures on a substrate, coating the one-dimensional silicon nanostructures with a first layer of titanium nitride, and coating a second layer of manganese dioxide onto the first layer. |
| priorityDate |
2017-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |