| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_565b87287bdd9bf79fd17183b8bbb9c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c99b1b72efb69810c4446d35b30695c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4df321de639cc142738e5a92f2fb50fd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01B1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D83-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D5-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01B1-00 |
| filingDate |
2020-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9ade0e0446ffd5861cc161889e1d88a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2de4c09991599225a311749159d01235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_188351fad21ffbb02d0030ec111dfc83 |
| publicationDate |
2021-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11098402-B2 |
| titleOfInvention |
Storage and delivery of antimony-containing materials to an ion implanter |
| abstract |
A novel method, composition and storage and delivery container for using antimony-containing dopant materials are provided. The composition is selected with sufficient vapor pressure to flow at a steady, sufficient and sustained flow rate into an arc chamber as part of an ion implant process. The antimony-containing material is represented by a non-carbon containing chemical formula, thereby reducing or eliminating the introduction of carbon-based deposits into the ion chamber. The composition is stored in a storage and delivery vessel under stable conditions, which includes a moisture-free environment that does not contain trace amounts of moisture. The storage and delivery container is specifically designed to allow delivery of high purity, vapor phase antimony-containing dopant material at a steady, sufficient and sustained flow rate. |
| priorityDate |
2017-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |