| abstract |
An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprisingn a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof nn n n n n n n n n n n n wherein n R 1 is a substituted or unsubstituted alkenyl group, n R 2 may be present or not, and if present R 2 is a —(CH 2 ) n —SO 3 − group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; andn na method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath. |