http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11067887-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0272d70c9ba3abebfdf08dc6b96f1120
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64
filingDate 2020-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_023b46fbe319e80a9c059f1973bafb07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aba0c9364816533e820f484232128b89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e3269444aed166b8b348a936fa7a353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b1476503520bfcb72632641791bea56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c25a93b23bbc4e9824d6b1e692a91b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_236f51c05198eb86a4c3559c9e006eda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae5bc5b356ffff746fe52f3f20cdc304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2bb211030b1fce0f9c540c60a5a5e62
publicationDate 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11067887-B2
titleOfInvention Apparatus for manufacturing pellicle
abstract A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.
priorityDate 2017-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007128552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07168345-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005316485-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006310047-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016168589-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06175358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101624078-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001109131-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5693382-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7572490-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5368675-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452260893

Total number of triples: 37.