| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-6116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30204 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2019-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_896f4030bd1c6c66b6e743ad83617a7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f144642343dd4c572deb4efc2c945aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_987a520169a59d83046a97a85a3f24ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf31a23e6955385ce4763ec830919c9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67a240235548275a92b1c304b9b09df4 |
| publicationDate |
2021-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11037289-B2 |
| titleOfInvention |
Method and system for scanning wafer |
| abstract |
The present disclosure provides a method and a system for scanning wafer. The system captures a defect image of a wafer, and generates a reference image corresponding to the first defect image based on a reference image generation model. The system generates a defect marked image based on the defect image and the reference image. |
| priorityDate |
2018-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |