| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e1291d0e49de60e2899c1957c18bc7a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-42155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-33034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-37436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B13-0265 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B13-02 |
| filingDate |
2018-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7006dadba9f5c0876ab825498b88a6d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a7379b39359c0cff273612294f2f165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f49bd4e15b7d214d97164337aa117647 |
| publicationDate |
2021-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11029673-B2 |
| titleOfInvention |
Generating robust machine learning predictions for semiconductor manufacturing processes |
| abstract |
Robust machine learning predictions. Temporal dependencies of process targets for different machine learning models can be captured and evaluated for the impact on process performance for target. The most robust of these different models is selected for deployment based on minimizing variance for the desired performance characteristic. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688616-B2 |
| priorityDate |
2017-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |