http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11005448-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94a912fe40ec96bf8083a5d6d7d8d3f9 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-172 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate | 2019-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28cb8f881bfbba316e02c3d348e866a6 |
| publicationDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-11005448-B2 |
| titleOfInvention | Film bulk acoustic wave resonators and fabrication methods thereof |
| abstract | A film bulk acoustic wave resonator includes a first substrate; a first insulating material layer, formed on the first substrate; a first cavity, formed in the first insulating material layer with an opening facing away from the first substrate; and an acoustic-wave resonant plate, including a first electrode, a piezoelectric oscillation plate, and a second electrode stacked on the first insulating material layer. The piezoelectric oscillation plate is disposed between the first electrode and the first electrode. The first electrode includes a first electrode cavity above the first cavity. The second electrode includes a second cavity above the first cavity. At least a portion of a boundary of the piezoelectric oscillation plate is formed by a boundary of the first electrode cavity and a boundary of the second electrode cavity. The boundary of the piezoelectric oscillation plate has an irregular polygonal shape without having two parallel edges. |
| priorityDate | 2018-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.