| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ce6b5a671c96a8b65cb01f83785cddd2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate |
2019-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0304f77c35a46507a713796f83ce5dd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84ba59187779ed3050eefc5fe2a252a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb2af07bf469d46ea43e1f6e02bb1f39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9100f6fe742e3d3ed8b3880528cfce1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad1df0dbe74c211c9d0921ab13461e93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fdcd1fd8eec2ffd3c37aa228ed37a30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fda605d1860cce2eacc0c4dc13a2447 |
| publicationDate |
2021-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10995268-B2 |
| titleOfInvention |
Etching composition effective to selectively wet etch a silicon nitride film |
| abstract |
A method of etching a silicon nitride film includes providing the etching composition; and wet etching the silicon nitride film in the etching composition at an etching rate that is at least 200 times faster than a corresponding silicon oxide film. |
| priorityDate |
2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |