http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10966308-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2016-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af7e15d50b0a138bb8d3f93d69b963ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_727ad15df32cbbd206b5d9e740e1672b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109ed1335f56424d4461f88b187a04e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3fe14443bdfd76459e64a8f0667bb7 |
| publicationDate | 2021-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-10966308-B2 |
| titleOfInvention | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods |
| abstract | A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet. |
| priorityDate | 2010-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.