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publicationNumber US-10941342-B2
titleOfInvention Etchant composition and method of manufacturing wiring substrate using the same
abstract An etchant composition may include: a peroxosulfate; a cyclic amine compound; a first amphoteric compound including a carboxyl group; and a second amphoteric compound including a sulfone group, wherein the second amphoteric compound may be different from the first amphoteric compound.
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